Note: You are seeing this text-only version of our site
because you are using an older browser that is not standards-compliant.
How to upgrade to a FREE standards-compliant browser.
Some Netscape 7 and Mozilla users may see this warning in error.
to fix the problem.
Back to Company
EL-FLOW® Series Mass Flow Meters/Controllers are thermal mass flow meters of modular construction with a 'laboratory style' pc-board housing. Control valves can either be integrally or separately mounted, to measure and control gas flows.
Metal-to-metal seal construction ensures long-term leak tightness (to atmosphere); Electropolished wetted parts; Flow ranges from 0.1...5 sccm up to 0.6...100 slm N2-equivalent (higher on request); Multi Gas/Multi Range functionality; Optional solutions for low pressure drop or vacuum applications; Pressure ranges from 0.1...5 up to 18...900 psi
Optional surface mount constructions (c-seal / w-seal); Compliant with RoHS directives; Modbus-RTU, DeviceNetTM, Profibus-DP®, or FLOW-BUS slave; RS232 interface; Accuracy, ± 0.8% RD + ± 0.2% FS; Storage of max. 8 calibration curves; Alarm and counter functions; Single rail power supply: +15 or +24 Vdc
Copyright © 2005-2017 Modbus Organization, Inc.
PO Box 628 Hopkinton, MA 01748. All rights reserved.
By using Modbus.org, you accept the terms of our visitor